HYT 9020 Series Plasma Particle Detector

Vacuum Particle Sensor

Many have dreamed of detecting particles above wafer during processing. That dream is now a reality.

The HYT 9020 Series can help you find process particles before wafer yield is affected through real-time monitoring of process particles.

  • Suited to high-vacuum processes
  • Unique, reliable solutions for managing particle contamination and improving yield
  • Above-wafer and above-turbo applications available for implant and etch equipment
Product Information
pdf HYT 9020 Series Plasma Particle Detector Operating Manual
pdf HYT 9020 Series Plasma Particle Detector Preliminary Datasheet
 
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