HYT 20SXG/25SXG Probe Sensors

Vacuum Particle Sensors


	Detect particles in non-corrosive, vacuum process equipment. Laser-based sensors that can be installed in loadlock or process chambers or into exhaust pump lines. Use in conjunction with an HYT controller to monitor particles continuously and in real time. Insensitive to high energy emissions, making them suitable for use in the presence of ion gauges and implanter flood guns.

High power laser diode for 0.19 micron sensitivity and large detection area 20SXG: Ultra compact probe design for installation in restricted spaces 25SXG: Mount directly within a chamber or process module for in-chamber monitoring